SPTS Primaxx uEtch
Hydrofluoric Acid (HF) etching machine
Equipment Information
Asset Sticker
177748
Manufacturer
Model
SPTS Technologies
Equipment Type
Hydrofluoric Acid (HF) etching machine
Application
Used for etching micro- and nanoscale patterns, device structuring, and surface modification in semiconductor processing, MEMS, and advanced materials research.
Description
The SPTS Primaxx uEtch is a high-precision dry etching system designed for uniform material removal in micro- and nanofabrication. It provides controlled plasma etching for a wide range of materials, including semiconductors, metals, and dielectrics.
Description
The SPTS Primaxx uEtch is a high-precision dry etching system designed for uniform material removal in micro- and nanofabrication. It provides controlled plasma etching for a wide range of materials, including semiconductors, metals, and dielectrics.
Contact Information
Contact
Nhat Khuong Nguyen
Email
nhatkhuong.nguyen@griffith.edu.au
Alternative Contact
Alternative Email
Other Information
Campus
Nathan
Certification
Group
SCG - Griffith Sciences
Element
QMF - Queensland Microtechnology Facility
Facility
Access
Staff Only
iLab Link
Other Links
Research or Teaching
Research
Research Categories
400908 - Microelectronics
Restrictions
Visibility
Public