Heidelberg Instruments MLA150
Maskless Aligner
Equipment Information
Asset Sticker
135969
Manufacturer
Heidelberg Instruments
Model
MLA150
Equipment Type
Maskless Aligner
Application
direct patterning of photolithography masks onto substrates without the need for physical masks
Description
A fast maskless aligner for R&D, rapid prototyping and small production volumes, designed for binary lithography.
Description
A fast maskless aligner for R&D, rapid prototyping and small production volumes, designed for binary lithography.
Contact Information
Contact
Pradip Singha
Email
p.singha@griffith.edu.au
Alternative Contact
Nhat Khuong Nguyen
Alternative Email
nhatkhuong.nguyen@griffith.edu.au
Other Information
Campus
Nathan
Certification
Group
SCG - Griffith Sciences
Element
MNC - Queensland Micro and Nanotechnology Centre
Facility
Access
Self - Service After Training
iLab Link
Other Links
Research or Teaching
Research
Research Categories
40 - ENGINEERING , 4014 - Manufacturing engineering , 401412 - Precision engineering
Restrictions
Visibility
Public