Heidelberg Instruments MLA150

Maskless Aligner

Equipment Information

Asset Sticker
135969
Manufacturer
Heidelberg Instruments
Model
MLA150
Equipment Type
Maskless Aligner
Application
Used for microfabrication, photolithography patterning, and prototyping in semiconductor, MEMS, microfluidics, and nanotechnology research, direct patterning of photolithography masks onto substrates without the need for physical masks
Description

The Heidelberg Instruments MLA150 is a high-resolution maskless lithography (photolithography) system that uses a digital micromirror device (DMD) for direct writing of micro- and nanostructures. It enables rapid, flexible patterning without the need for photomasks, supporting a wide range of substrates and photoresists.

Description

The Heidelberg Instruments MLA150 is a high-resolution maskless lithography (photolithography) system that uses a digital micromirror device (DMD) for direct writing of micro- and nanostructures. It enables rapid, flexible patterning without the need for photomasks, supporting a wide range of substrates and photoresists.

Contact Information

Contact
Pradip Singha
Email
p.singha@griffith.edu.au
Alternative Contact
Nhat Khuong Nguyen
Alternative Email
nhatkhuong.nguyen@griffith.edu.au

Other Information

Campus
Nathan
Certification
Group
SCG - Griffith Sciences
Element
QMF - Queensland Microtechnology Facility
Facility
Access
Self - Service After Training
iLab Link
Other Links
Research or Teaching
Research
Research Categories
40 - ENGINEERING , 4014 - Manufacturing engineering , 401412 - Precision engineering
Restrictions
Visibility
Public