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  • Laurell Technologies WS-650-23

    Spin Coater

    The Laurell Technologies WS-650-23 is a programmable spin processor designed for precise control of spin speed and acceleration during wafer cleaning and drying. It supports a variety of cleaning and rinsing protocols for surface [...]

    401805 - Nanofabrication, growth and self assembly
    Nathan
    Pradip Singha

  • Heidelberg Instruments MLA150

    Maskless Aligner

    The Heidelberg Instruments MLA150 is a high-resolution maskless lithography (photolithography) [...]

    401412 - Precision engineering
    Nathan
    Pradip Singha

  • Accuthermo AW-610

    Rapid Thermal Process Equipment

    "The AW610 is a rapid thermal processing (RTP) system, which uses high intensity visible radiation to heat single wafers for short process periods of time at precisely controlled temperatures for annealing. The process periods are [...]

    401804 - Nanoelectronics
    Nathan
    Philip Tanner

  • Park Systems NX20

    Atomic Force Microscope

    Park Systems NX20 Atomic Force Microscope (AFM) provides high-resolution [...]

    401810 - Nanoscale characterisation
    Nathan
    Leonie Hold