Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times.

"Leybold TURBOVAC 250i turbomolecular high-vacuum pumps have a pumping speed up to 250 liters per second (l/s), with an ISO-K 100 inlet flange, and an ISO KF-16 exhaust foreline flange."

"The AW610 is a rapid thermal processing (RTP) system, which uses high intensity visible radiation to heat single wafers for short process periods of time at precisely controlled temperatures for annealing. The process periods are [...]

The Heidelberg Instruments MLA150 is a high-resolution maskless lithography (photolithography) [...]