The Edwards iXM 200 is a new range of dry pumps built for green manufacturing. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation [...]

The SPTS Primaxx uEtch is a high-precision dry etching system designed for uniform material removal in micro- and nanofabrication. It provides controlled plasma etching for a wide range of materials, including semiconductors, metals, [...]

Chemical Vapour Deposition

This is a large production batch reactor for 3C-Silicon Carbide epitaxy up to 300 mm wafers via Chemical Vapor Deposition (CVD)

The Edwards iXM 200 is a new range of dry pumps built for green manufacturing. Using very low energy the efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation [...]